PI: Dr. Mark G. Allen
Sponsor: Milli-Sensor Systems & Actuators

Electroplated materials often have mechanical properties that differ from their bulk counterparts. A microfabricated test device has been made to measure the Young's and shear modulus of electroplated 80/20 nickel-iron (NiFe) in-situ for micro-electro-mechanical devices. The Young's modulus was calculated to be E=65GPa, which differs substantially from bulk NiFe with a E=210GPa. The shear modulus was found to be G=44GPa±15GPa which differs from the bulk shear modulus G=80GPa. The photomicrograph is of a Young's Modulus test structure. The plot shows the force applied to the paddle of the test structure and the subsequent deflection that was measured. The slope of the graph (51.7 ±0.624 N/m) is the spring constant of the four flexures of the test structure. The Young's modulus may be calculated from the geometry of the flexures.

Related Publications:

C. Chung and M. Allen., "Measurement of Mechanical Properties of Electroplated Nickel-Iron Alloys," ASME International Mechanical Engineering Congress and Exposition. 1996.